Plasma Surface Modification for Selective Hydrophobic Control
نویسندگان
چکیده
The main objective of this research is theoretical and experimental investigation of the surfaces modification of SU8, PDMS, SiO2 and Si by RF plasma treatment. Physical-chemical reactions at room temperature can be used for the modifications of the surfaces in plasma, by modifying the contact angle, superficial polymerization, or by creating hydrophilic and/or hydrophobic regions on the surfaces in contact with plasma. The argon-plasma annealing was used for generate the hydrophilic surfaces, and plasma of CF4 or CF4 with O2 has been used for creating of the hydrophobic surfaces.
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